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Nr. Titel Autor Jahr
1 Integration of (Poly-Si/Air)n Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer-Level MOEMS Fabrication Process Helke, Christian* et al. 2023
2 Optimal design of piezoelectric MEMS for vibration monitoring system with nanoionics zero-energy memory elements Shaporin, Alexey* et al. 2023
3 Storing MEMS Interfaces Without Electrical Auxiliary Energy for Long-Time Monitoring Hoffmann, Martin et al. 2023
4 Passive, frequency-selective piezoelectric MEMS with wake-up electronics for ultra-low-power vibration sensors Stoeckel, Chris* et al. 2022
5 Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors Stöckel, Chris* et al. 2022
6 Design and technology for uniform aluminum nitride piezoelectric micromachined ultrasonic transducers with radial array Stöckel, Chris et al. 2021
7 Piezoelectric Scanning Micromirror With Built-In Sensors Based on Thin Film Aluminum Nitride Meinel, Katja* et al. 2021
8 Speichernde Sensorkonzepte mit in-memory-Computing, ganz ohne elektrische Hilfsenergie Hoffmann, Martin et al. 2021
9 2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based On Piezoelectric Thin Film Aluminum Nitride Meinel, Katja* et al. 2020
10 On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes Haase, Micha* et al. 2020
11 Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride Meinel, Katja et al. 2020
12 Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride Meinel, Katja et al. 2019
13 Piezoelectric Scanning Micromirror with Large Scan Angle Based on Thin Film Aluminum Nitride Meinel, Katja et al. 2019
14 Piezoelektrischer Mikrospiegel mit großem Scanwinkel, basierend auf Dünnschicht-Aluminiumnitrid Meinel, Katja et al. 2019
15 MEMS based IEDF/IADF sensing: Kinetic analysis of the ion dynamics inside the sensor Roessel, Kerstin et al. 2018
16 Reactive bonding with oxide based reactive multilayers Vogel, Klaus et al. 2018
17 The role of plasma analytics in leading‐edge semiconductor technologies Zimmermann, Sven* et al. 2018
18 A plasma assisted in situ restoration process for sidewall damaged ULK dielectrics Koehler, Nicole* et al. 2016
19 CF3Br plasma cryo etching of low-k porous dielectric Clemente, I. et al. 2016
20 Experimental and Theoretical Investigations on an in situ k-restore Process with Plasma Enhanced Fragmentation for Damaged ULK Materials Förster, Anja et al. 2015
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