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Nr. Titel Autor Jahr
1 High precision electrostatic MEMS actuators for in-plane Fabry-Pérot gas sensors Shaporin, Alexey* et al. 2024
2 Plastic Waste Recycling-A Chemical Recycling Perspective Schade, Alexander* et al. 2024
3 Measuring Ion Energy Distributions by Retarding Field Energy Analyzer and Using Low-Energy Ions for Si-ALE by Cl2 Dittmar, Nils et al. 2023
4 Optimal design of piezoelectric MEMS for vibration monitoring system with nanoionics zero-energy memory elements Shaporin, Alexey* et al. 2023
5 Passive, frequency-selective piezoelectric MEMS with wake-up electronics for ultra-low-power vibration sensors Stoeckel, Chris* et al. 2022
6 Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors Stöckel, Chris* et al. 2022
7 Design and technology for uniform aluminum nitride piezoelectric micromachined ultrasonic transducers with radial array Stöckel, Chris et al. 2021
8 Piezoelectric Scanning Micromirror With Built-In Sensors Based on Thin Film Aluminum Nitride Meinel, Katja* et al. 2021
9 2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based On Piezoelectric Thin Film Aluminum Nitride Meinel, Katja* et al. 2020
10 On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes Haase, Micha* et al. 2020
11 Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride Meinel, Katja et al. 2020
12 Ruthenium(II) MOCVD Precursors for Phosphorus-Doped Ruthenium Layer Formation Preuß, Andrea et al. 2020
13 Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride Meinel, Katja et al. 2019
14 Piezoelectric Scanning Micromirror with Large Scan Angle Based on Thin Film Aluminum Nitride Meinel, Katja et al. 2019
15 Piezoelektrischer Mikrospiegel mit großem Scanwinkel, basierend auf Dünnschicht-Aluminiumnitrid Meinel, Katja et al. 2019
16 MEMS based IEDF/IADF sensing: Kinetic analysis of the ion dynamics inside the sensor Roessel, Kerstin et al. 2018
17 Thin Film Piezoelectric Aluminum Nitride for Piezoelectric Micromachined Ultrasonic Transducers Stöckel, Chris et al. 2018
18 Low-temperature chemical vapor deposition of cobalt oxide thin films from a dicobaltatetrahedrane precursor Melzer, Marcel et al. 2017
19 Bis(β-diketonato)- and allyl-(β-diketonato)-palladium(II) complexes: synthesis, characterization and MOCVD application Assim, Khaybar et al. 2016
20 Chemical vapor deposition of ruthenium-based layers by a single-source approach Jeschke, Janine et al. 2016
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