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Nr. Titel Autor Jahr
1 Measuring Ion Energy Distributions by Retarding Field Energy Analyzer and Using Low-Energy Ions for Si-ALE by Cl2 Dittmar, Nils et al. 2023
2 Optimal design of piezoelectric MEMS for vibration monitoring system with nanoionics zero-energy memory elements Shaporin, Alexey* et al. 2023
3 Passive, frequency-selective piezoelectric MEMS with wake-up electronics for ultra-low-power vibration sensors Stoeckel, Chris* et al. 2022
4 Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors Stöckel, Chris* et al. 2022
5 Design and technology for uniform aluminum nitride piezoelectric micromachined ultrasonic transducers with radial array Stöckel, Chris et al. 2021
6 Piezoelectric Scanning Micromirror With Built-In Sensors Based on Thin Film Aluminum Nitride Meinel, Katja* et al. 2021
7 2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based On Piezoelectric Thin Film Aluminum Nitride Meinel, Katja* et al. 2020
8 On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes Haase, Micha* et al. 2020
9 Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride Meinel, Katja et al. 2020
10 Ruthenium(II) MOCVD Precursors for Phosphorus-Doped Ruthenium Layer Formation Preuß, Andrea et al. 2020
11 Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride Meinel, Katja et al. 2019
12 Piezoelectric Scanning Micromirror with Large Scan Angle Based on Thin Film Aluminum Nitride Meinel, Katja et al. 2019
13 Piezoelektrischer Mikrospiegel mit großem Scanwinkel, basierend auf Dünnschicht-Aluminiumnitrid Meinel, Katja et al. 2019
14 MEMS based IEDF/IADF sensing: Kinetic analysis of the ion dynamics inside the sensor Roessel, Kerstin et al. 2018
15 Thin Film Piezoelectric Aluminum Nitride for Piezoelectric Micromachined Ultrasonic Transducers Stöckel, Chris et al. 2018
16 Low-temperature chemical vapor deposition of cobalt oxide thin films from a dicobaltatetrahedrane precursor Melzer, Marcel et al. 2017
17 Bis(β-diketonato)- and allyl-(β-diketonato)-palladium(II) complexes: synthesis, characterization and MOCVD application Assim, Khaybar et al. 2016
18 Chemical vapor deposition of ruthenium-based layers by a single-source approach Jeschke, Janine et al. 2016
19 ALD of Transition Metals and Metal Oxides for Applications in Electronics and Sensor Devices Waechtler, Thomas et al. 2013
20 Copper oxide atomic layer deposition on thermally pretreated multi-walled carbon nanotubes for interconnect applications Melzer, Marcel et al. 2013
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