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Nr. Titel Autor Jahr
1 Integration of (Poly-Si/Air)n Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer-Level MOEMS Fabrication Process Helke, Christian* et al. 2023
2 A MEMS IR optical chopper based on subwavelength structures Kurth, Steffen et al. 2019
3 Integration of plasmonic nanostructures for micro-opto-electromechanical-systems Heldt, Georg et al. 2019
4 Mikro- und Nanotechnologien zur Herstellung steuerbarer optischer Filter Hiller, Karla et al. 2019
5 Nanostructured al SWG Reflectors on thin LP-Si3N4 Membranes as (TiO2/SiO2)³ Bragg Reflector Alternative for Vis Fabry-Pérot Interferometers Helke, Christian* et al. 2019
6 Next Generation of Highly Miniaturized Bulk-Mems Fabry-Pérot Filters For Infrared Microspectrometers Ebermann, Martin* et al. 2019
7 VIS Fabry-Pérot Interferometer with structured (TiO2/PE-SiO2)³ Bragg-reflectors on 5mm large LP-Si3N4 membranes Helke, Christian et al. 2019
8 Functional Integration - Structure-Integrated Wireless Sensor Technology Targeting Smart Mechanical Engineering Applications Rülke, Steffen et al. 2018
9 Integrated Microsystems for Smart Applications Otto, Thomas* et al. 2018
10 Challenges of nanostructure-integration in Fabry-Pérot interferometers as alternative to Bragg reflectors: an example for Match 1:1-, eBeam-, and nanoimprint lithography Helke, Christian et al. 2017
11 Large-scale fabrication of LP-CVD Si3N4 photonic crystal structures as freestanding reflectors with 1 mm aperture for Fabry-Pérot interferometers Helke, Christian et al. 2017
12 Millimeterwellen-Sensorsystem zur Messung der Sauerstoffkonzentration in Gasen Wecker, Julia et al. 2017
13 Elektronenstrahl-lithographisch erzeugte Nanostrukturen für optische Mikrosysteme Heldt, Georg et al. 2016
14 MEMS Tunable Fabry-Pérot Filters for Infrared Microspectrometer Applications Neumann, Norbert et al. 2016
15 Oxygen detection system consisting of a millimeter wave Fabry-Pérot resonator and an integrated SiGe front-end Wecker, Julia et al. 2016
16 Tunable Fabry-Pérot interferometer with subwavelength grating reflectors for MWIR microspectrometers Meinig, Marco et al. 2016
17 Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: a review Ebermann, Martin et al. 2016
18 VIS Fabry-Pérot-Interferometer with (HL)4 PE-Si3N4/PE-SiO2 reflectors on freestanding LP-Si3N4 membranes for surface enhanced Raman spectroscopy Helke, Christian et al. 2016
19 A fast MEMS infrared microspectrometer for the measurement of hydrocarbon gases Ebermann, Martin et al. 2015
20 Electrically tunable Fabry-Pérot interferometer with inherent compensation of the influence of gravitation and vibration Meinig, Marco et al. 2015
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