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Nr. Titel Autor Jahr
1 Development of an e-beam/i-line stepper intra-level mix and match approach with the photoresist mr-EBL 6000.5 for PIC related structures such as waveguides, ring resonators and coupling structures Reinhardt, Markus et al. 2023
2 Fabrication and Integration of Quantum Dot Based Emitters for Smart Mechanical Watches Langenickel, Jörn et al. 2023
3 Integration of (Poly-Si/Air)n Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer-Level MOEMS Fabrication Process Helke, Christian* et al. 2023
4 Intra-level mix and match lithography with electron beam lithography and i-line stepper combined with resolution enhancement for structures below the CD-limit Helke, Christian* et al. 2023
5 Measuring Ion Energy Distributions by Retarding Field Energy Analyzer and Using Low-Energy Ions for Si-ALE by Cl2 Dittmar, Nils et al. 2023
6 Multichannel laser diode to polymer waveguide array coupling with a double-aspheric lens Kunze, Katharina* et al. 2023
7 Nanolithographic Fabrication Technologies for Network-Based Biocomputation Devices Meinecke, Christoph R.* et al. 2023
8 Tunable Fabry-Pérot interferometer integrated in a silicon waveguide of an on-chip optical platform for long infrared wavelengths Wecker, Julia et al. 2023
9 Biocomputation Using Molecular Agents Moving in Microfluidic Channel Networks: An Alternative Platform for Information Technology Blaudeck, Thomas* et al. 2022
10 Fabrication of Nanoimprint-Lithography masters for optical nano gratings Helke, Christian et al. 2022
11 High-resolution projection lithography for MEMS-applications using thick photoresist AZ 10XT Schermer, Sebastian et al. 2022
12 Hochauflösende Projektions-Lithografie für die Herstellung von MEMS-Strukturen mit hohem Aspekt-Verhältnis und für Nano-Imprint-Lithografie Mastern für optische Gitter Schermer, Sebastian et al. 2022
13 Integration von thermosensitiven Polymeren in nanoskalige Kanäle zur Realisierung von mikrofluidischen Schaltungen Bickmann, Ch. et al. 2022
14 Lithographic performance of resist ma-N 1402 in an e-beam/i-line stepper intra-level mix and match approach Canpolat-Schmidt, Cansu Hanim et al. 2022
15 On the Fabrication and Characterization of Polymer-Based Waveguide Probes for Use in Future Optical Cochlear Implants Helke, Christian* et al. 2022
16 Roadmap for network-based biocomputation van Delft, Falco et al. 2022
17 Solving Exact Cover Instances with Molecular-Motor-Powered Network-Based Biocomputation Surendiran, Pradheebha et al. 2022
18 Solving the 3-SAT problem using network-based biocomputation Zhu, Jingyuan et al. 2022
19 Solving the 3-Satisfiability Problem Using Network-Based Biocomputation Zhu, Jingyuan et al. 2022
20 The BDRIE-HS* Technology Approach for Tiny Motion Detection with Improved Sensitivity and Noise Performance Forke, Roman et al. 2022
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