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Nr. Titel Autor Jahr
1 2.5D-patterning via i-line grayscale exposure for photonic structures and micro lens arrays Schermer, Sebastian et al. 2024
2 A New Phase Diagram for Fluid Invasion Patterns as a Function of Pore-Scale Heterogeneity, Surface Roughness, and Wettability Geistlinger, Helmut* et al. 2024
3 About the Data Analysis of Optical Emission Spectra of Reactive Ion Etching Processes—The Method of Spectral Redundancy Reduction Haase, Micha* et al. 2024
4 Aluminum-nitride-based modular photonic integrated circuit technology and characterization platform (PIC-TCP) Tank, Franz et al. 2024
5 Characterization of negative tone photoresist mr-EBL 6000.5 for i-line stepper and electron beam lithography for the Intra-Level Mix & Match Approach Schermer, Sebastian* et al. 2024
6 Combining nano-scale imprint lithography and reactive ion etching to fabricate high-quality surface relief gratings Haase, Micha et al. 2024
7 Evaluation of Thin Pd Layers for a Sensor System Monitoring Anode-Side Hydrogen Concentration in a Fuel Cell Bickmann, Christopher et al. 2024
8 Fabrication of switchable biocompatible, nano-fluidic devices using a thermoresponsive polymer on nano-patterned surfaces Bickmann, Christopher* et al. 2024
9 Impact of Dielectric Types on Surface Topography for Wafer-Level Hybrid Bonding Dubey, Vikas* et al. 2024
10 Molecular approach to semiconductors: a shift towards ecofriendly manufacturing and neuroinspired interfaces Monakhov, Kirill Yu.* et al. 2024
11 Navigating Complex Process and Design Challenges in Hybrid Bonding for Advanced Semiconductor Integration: A Comprehensive Analysis Dubey, Vikas* et al. 2024
12 Scalable fabrication approach and fill factor optimization for single pixel microlens arrays Bonitz, Jens* et al. 2024
13 Technology for Piezoelectric Micromachined Ultrasonic Transducers with Adaptive Channel Geometry and Chip Size Stoeckel, Chris et al. 2024
14 Development of an e-beam/i-line stepper intra-level mix and match approach with the photoresist mr-EBL 6000.5 for PIC related structures such as waveguides, ring resonators and coupling structures Reinhardt, Markus et al. 2023
15 Fabrication and Integration of Quantum Dot Based Emitters for Smart Mechanical Watches Langenickel, Jörn et al. 2023
16 Integration of (Poly-Si/Air)n Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer-Level MOEMS Fabrication Process Helke, Christian* et al. 2023
17 Intra-level mix and match lithography with electron beam lithography and i-line stepper combined with resolution enhancement for structures below the CD-limit Helke, Christian* et al. 2023
18 Measuring Ion Energy Distributions by Retarding Field Energy Analyzer and Using Low-Energy Ions for Si-ALE by Cl2 Dittmar, Nils et al. 2023
19 Multichannel laser diode to polymer waveguide array coupling with a double-aspheric lens Kunze, Katharina* et al. 2023
20 Nanolithographic Fabrication Technologies for Network-Based Biocomputation Devices Meinecke, Christoph R.* et al. 2023
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Anzahl der Ergebnisseiten: 6
Anzahl der Dokumente: 103

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