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Nr. Titel Autor Jahr
1 Process and equipment modeling for chemical thin film deposition Jäckel, Linda 2025
2 Fabrication of switchable biocompatible, nano-fluidic devices using a thermoresponsive polymer on nano-patterned surfaces Bickmann, Christopher* et al. 2024
3 Impact of Dielectric Types on Surface Topography for Wafer-Level Hybrid Bonding Dubey, Vikas* et al. 2024
4 Investigations on Low-Temperature Aluminium Thermocompression Bonding Using Surface Passivation Technique Diex, Kevin et al. 2024
5 Investigations on low-temperature thermocompression bonding of passivated aluminum for enhanced wafer-level packaging and heterogeneous integration Diex, Kevin* et al. 2024
6 Modeling the temporal evolution and stability of thin evaporating films for wafer surface processing Huber, Max* et al. 2024
7 Molecular approach to semiconductors: a shift towards ecofriendly manufacturing and neuroinspired interfaces Monakhov, Kirill Yu.* et al. 2024
8 Navigating Complex Process and Design Challenges in Hybrid Bonding for Advanced Semiconductor Integration: A Comprehensive Analysis Dubey, Vikas* et al. 2024
9 Process Development of Aluminum Electroplating from an Ionic Liquid on 150 mm Wafer Level Braun, Silvia* et al. 2024
10 Alkaline earth metal and lanthanide ethylene glycol carboxylates for metal oxide layer formation by spin coating Scharf, Sebastian et al. 2023
11 Development of a Cobalt Atomic Layer Deposition Process using Co2(CO)6HC=CC5H11 as Precursor Franz, Mathias* et al. 2023
12 Fabrication of local areas of high aspect ratio silicon structures using metal-assisted chemical etching Franz, Mathias et al. 2023
13 Fabrication of local areas of high aspect ratio silicon structures using metal-assisted chemical etching - MACE Franz, Mathias et al. 2023
14 Impact of Dielectric and Copper Via Design on Wafer-to-Wafer Hybrid Bonding Dubey, Vikas* et al. 2023
15 Low temperature atomic layer deposition of cobalt using dicobalt hexacarbonyl-1-heptyne as precursor Franz, Mathias* et al. 2023
16 Nanolithographic Fabrication Technologies for Network-Based Biocomputation Devices Meinecke, Christoph R.* et al. 2023
17 Biocomputation Using Molecular Agents Moving in Microfluidic Channel Networks: An Alternative Platform for Information Technology Blaudeck, Thomas* et al. 2022
18 Integration von thermosensitiven Polymeren in nanoskalige Kanäle zur Realisierung von mikrofluidischen Schaltungen Bickmann, Ch. et al. 2022
19 Modeling the temporal evolution and stability of thin evaporating films for wafer surface processing Huber, Max* et al. 2022
20 Berechnung mit biologischen Molekülen - ein alternativer Ansatz in Informationstechnologien Blaudeck, Thomas et al. 2021
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Anzahl der Dokumente: 228

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