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Nr. Titel Autor Jahr
1 Kontinuierliche Fertigung intelligenter hybrider Verbunde Hübler, Arved Carl et al. 2019
2 ALD of Metal and Metal Oxide Thin Films for Applications in ULSI Metallization Systems and Spintronic Layer Stacks Waechtler, T. et al. 2012
3 Fabrication and Characterization of CNT via interconnects for application in integrated circuits Fiedler, H. et al. 2012
4 Simulation of Nanostructures for Sensor and Circuit Applications Zienert, Andreas et al. 2012
5 Structuring of carbon nanotubes for field emission based movement sensors Loschek, Sergei et al. 2012
6 Research methods to assess the acceptance of EVs - experiences from an EV user study Krems, Josef F. et al. 2010
7 A novel method for the fabrication of deep-submicron structure Jia, C. et al. 2009
8 Characterization of eutectic wafer bonding using Gold and Silicon Lin, Y. C. et al. 2009
9 Controlling the Formation of Nanoparticles for Definite Growth of Carbon Nanotubes for Interconnect Applications Hermann, S. et al. 2009
10 Coplanar Electromagnetic Signal Coupler for Wafer-Scale Packaging of RF-MEMS Devices Leidich, S. et al. 2009
11 Copper Oxide ALD from a Cu(I)beta-Diketonate: Growth Studies and Application as Seed Layers for Electrochemical Copper Deposition Waechtler, T. et al. 2009
12 Development and Evaluation of AuSi Eutectic Wafer Bonding Lin, Y. C. et al. 2009
13 Development and evaluation of nanoscale reactive structures for low-temperature bonding in Microsystems Technolgy Braeuer, J. et al. 2009
14 Electrochemical deposition of reactive nanoscale metallization systems for low temperature bonding in 3D integration Hofmann, L. et al. 2009
15 Electronic Transport Properties in Copper Nanowire Hermann, S. et al. 2009
16 Hermetic Thin Film Encapsulation of Mechanical Transducers for Smart Label Applications Reuter, D. et al. 2009
17 Hierarchisches mikrofluidisches System Morschhauser, A. et al. 2009
18 High Order Derivatives Technology in Advanced MEMS Modeling Kolchuzhin, Vladimir et al. 2009
19 Integration of Inertial MEMS Sensors in Active Smart RFID Labels for Transport Monitoring Reuter, D. et al. 2009
20 Integration of MEMS Inertial Sensors in Smart RFID Labels for Transport Monitoring of Sensitive Goods Nowack, M. et al. 2009
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