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Nr. Titel Autor Jahr
1 Efficient Quadrature Suppression for Improved Performance of a MEMS Vibratory Gyroscope Forke, Roman et al. 2023
2 Optimal design of piezoelectric MEMS for vibration monitoring system with nanoionics zero-energy memory elements Shaporin, Alexey* et al. 2023
3 Storing MEMS Interfaces Without Electrical Auxiliary Energy for Long-Time Monitoring Hoffmann, Martin et al. 2023
4 High-G Acceleration Sensors for the Automotive Industry Pregl, Sebastian et al. 2022
5 Mikromechanisch strukturierter, CMOS-kompatibler pyroelektrischer Detektor auf der Basis von dotiertem HfO2 in Trenchzellen Mutschall, Doris et al. 2022
6 Modular Probecard-Measurement Equipment for Automated Wafer-Level Characterization of High Precision MEMS Gyroscopes Weidlich, Sebastian et al. 2022
7 Nordsuche - Performance Demonstration für Präzisions-MEMS-Gyroskope Bülz, Daniel et al. 2022
8 Passive, frequency-selective piezoelectric MEMS with wake-up electronics for ultra-low-power vibration sensors Stoeckel, Chris* et al. 2022
9 The BDRIE-HS* Technology Approach for Tiny Motion Detection with Improved Sensitivity and Noise Performance Forke, Roman et al. 2022
10 Compact Standalone North-finding Device based on MEMS Gyroscope and Maytagging Bülz, Daniel et al. 2021
11 North finding with a single double mass MEMS gyroscope- A performance demonstrator Bülz, Daniel et al. 2021
12 2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based On Piezoelectric Thin Film Aluminum Nitride Meinel, Katja* et al. 2020
13 Design methodology and results evaluation of a heating functionality in modular lab-on-chip systems Streit, Petra* et al. 2018
14 Investigation on the temperature distribution of integrated heater configurations in a Lab-on-a-Chip system Streit, Petra et al. 2017
15 Results of multi-mass high precision vibratory MEMS gyroscopes for two types of system approaches Popova, Irina et al. 2017
16 Schallemissionssensorsystem für die Zustandsüberwachung Berner, Tom et al. 2017
17 A MEMS test stage for in situ testing of interfaces between carbon nanotubes and metals Hartmann, Steffen et al. 2016
18 Experimentelle Analyse von thermischen Aktoren in BDRIE-Technologie Voigt, Sebastian et al. 2016
19 Thermal design of integrated heating for lab-on-a-chip systems Streit, Petra et al. 2016
20 Towards nanoreliability of sensors incorporating interfaces between single-walled carbon nanotubes and metals : molecular dynamics simulations and in situ experiments using electron microscopy Hartmann, Steffen* et al. 2016
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