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Nr. Titel Autor Jahr
1 On the Feasibility of the BDRIE-HS* Technology for a MEMS Gyroscope Forke, Roman et al. 2025
2 Real-Time Interfacial Pressure Prediction in CMP Using Machine Learning Surrogates of Finite Element Simulations Rothe, Tom* et al. 2025
3 Advancement in the Mems Gyroscope from a Vibrating Tuning Fork to a Tuned Ring with Comb Electrodes Forke, Roman et al. 2024
4 Characterization of Thin AlN/Ag/AlN-Reflector Stacks on Glass Substrates for MEMS Applications Behl, Christian* et al. 2024
5 High precision electrostatic MEMS actuators for in-plane Fabry-Pérot gas sensors Shaporin, Alexey* et al. 2024
6 High Sensitivity Mode-Localized Ring Resonator With Tunable Sensitivity Tsukamoto, Takashiro et al. 2024
7 Mode Localization and Frequency Modulation Sensing Using Superposed in-Phase and Anti-Phase Oscillations Tsukamoto, Takashiro et al. 2024
8 Efficient Quadrature Suppression for Improved Performance of a MEMS Vibratory Gyroscope Forke, Roman et al. 2023
9 Optimal design of piezoelectric MEMS for vibration monitoring system with nanoionics zero-energy memory elements Shaporin, Alexey* et al. 2023
10 Storing MEMS Interfaces Without Electrical Auxiliary Energy for Long-Time Monitoring Hoffmann, Martin et al. 2023
11 High-G Acceleration Sensors for the Automotive Industry Pregl, Sebastian et al. 2022
12 Mikromechanisch strukturierter, CMOS-kompatibler pyroelektrischer Detektor auf der Basis von dotiertem HfO2 in Trenchzellen Mutschall, Doris et al. 2022
13 Modular Probecard-Measurement Equipment for Automated Wafer-Level Characterization of High Precision MEMS Gyroscopes Weidlich, Sebastian et al. 2022
14 Nordsuche - Performance Demonstration für Präzisions-MEMS-Gyroskope Bülz, Daniel et al. 2022
15 Passive, frequency-selective piezoelectric MEMS with wake-up electronics for ultra-low-power vibration sensors Stoeckel, Chris* et al. 2022
16 The BDRIE-HS* Technology Approach for Tiny Motion Detection with Improved Sensitivity and Noise Performance Forke, Roman et al. 2022
17 Compact Standalone North-finding Device based on MEMS Gyroscope and Maytagging Bülz, Daniel et al. 2021
18 North finding with a single double mass MEMS gyroscope- A performance demonstrator Bülz, Daniel et al. 2021
19 2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based On Piezoelectric Thin Film Aluminum Nitride Meinel, Katja* et al. 2020
20 Design methodology and results evaluation of a heating functionality in modular lab-on-chip systems Streit, Petra* et al. 2018
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