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Nr. Titel Autor Jahr
1 Full-Field IR-Thermography for Bond-Quality Inspection of Electroplated Aluminium Interconnects for Cryo-SiP Architectures Wunderle, Bernhard et al. 2024
2 Full-Field Through-Chip IR-Thermography-based Quality Testing & Failure Analysis on Electroplated Aluminium Interconnects for Cryogenic Applications in Ion-Trap Quantum Computers May, Daniel* et al. 2024
3 High precision electrostatic MEMS actuators for in-plane Fabry-Pérot gas sensors Shaporin, Alexey* et al. 2024
4 Untersuchungen zur Anwendung strukturintegrierter Resonatorarrays für das Erkennen stofflicher Veränderungen in polymerbasierten Leichtbaumaterialien Großmann, Toni Dirk 2024
5 Integration of (Poly-Si/Air)n Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer-Level MOEMS Fabrication Process Helke, Christian* et al. 2023
6 Tunable Fabry-Pérot interferometer integrated in a silicon waveguide of an on-chip optical platform for long infrared wavelengths Wecker, Julia et al. 2023
7 Multi-Mode Silicon Waveguides at Long Infrared Wavelengths Wecker, Julia et al. 2022
8 A MEMS IR optical chopper based on subwavelength structures Kurth, Steffen et al. 2019
9 Integration of plasmonic nanostructures for micro-opto-electromechanical-systems Heldt, Georg et al. 2019
10 Mikro- und Nanotechnologien zur Herstellung steuerbarer optischer Filter Hiller, Karla et al. 2019
11 Nanostructured al SWG Reflectors on thin LP-Si3N4 Membranes as (TiO2/SiO2)³ Bragg Reflector Alternative for Vis Fabry-Pérot Interferometers Helke, Christian* et al. 2019
12 Next Generation of Highly Miniaturized Bulk-Mems Fabry-Pérot Filters For Infrared Microspectrometers Ebermann, Martin* et al. 2019
13 Reflection based Strain Sensing using Metamaterials Großmann, Toni D. et al. 2019
14 Technologien zur Integration von Metaflächen Großmann, Toni et al. 2019
15 VIS Fabry-Pérot Interferometer with structured (TiO2/PE-SiO2)³ Bragg-reflectors on 5mm large LP-Si3N4 membranes Helke, Christian et al. 2019
16 Integrated Microsystems for Smart Applications Otto, Thomas* et al. 2018
17 Metamaterial based Sensor Approach for Passive StructuralHealth Monitoring of Lightweight Structures Großmann, Toni Dirk et al. 2018
18 Challenges of nanostructure-integration in Fabry-Pérot interferometers as alternative to Bragg reflectors: an example for Match 1:1-, eBeam-, and nanoimprint lithography Helke, Christian et al. 2017
19 Integrierte Geschäftsmodell- und Technologieentwicklung für smarte Systeme und Strukturen Götze, Uwe et al. 2017
20 Large-scale fabrication of LP-CVD Si3N4 photonic crystal structures as freestanding reflectors with 1 mm aperture for Fabry-Pérot interferometers Helke, Christian et al. 2017
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