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Nr. Titel Autor Jahr
1 Comparison of two types of silicon nitride grating couplers for 1550nm wavelength with slots and square holes and different deposition methods Schumann, Anne-Katrin* et al. 2025
2 Nanolithographic waveguides, couplers and ring resonators made of Si3N4 and AlN for photonics and quantum technologies Wecker, Julia* et al. 2025
3 On the Feasibility of the BDRIE-HS* Technology for a MEMS Gyroscope Forke, Roman et al. 2025
4 Optomechanical Inertial Sensors Based on Ring Resonators: Design Approaches and Technology Shaporin, Alexey et al. 2025
5 Advancement in the Mems Gyroscope from a Vibrating Tuning Fork to a Tuned Ring with Comb Electrodes Forke, Roman et al. 2024
6 High Sensitivity Mode-Localized Ring Resonator With Tunable Sensitivity Tsukamoto, Takashiro et al. 2024
7 Mode Localization and Frequency Modulation Sensing Using Superposed in-Phase and Anti-Phase Oscillations Tsukamoto, Takashiro et al. 2024
8 Efficient Quadrature Suppression for Improved Performance of a MEMS Vibratory Gyroscope Forke, Roman et al. 2023
9 MEMS-Based Fingerprinting Architecture for Trustworthy Electronics Meinel, Katja et al. 2023
10 Optimal design of piezoelectric MEMS for vibration monitoring system with nanoionics zero-energy memory elements Shaporin, Alexey* et al. 2023
11 Storing MEMS Interfaces Without Electrical Auxiliary Energy for Long-Time Monitoring Hoffmann, Martin et al. 2023
12 Erhöhung des Aspektverhältnisses der industriellen XMB10-Technologie durch nachträgliche Reduktion des Elektrodenspalts mittels Zustellen und Verschweißen Künzel, Petra et al. 2022
13 High-G Acceleration Sensors for the Automotive Industry Pregl, Sebastian et al. 2022
14 MEMS-basierte Fingerprint-Architektur für Vertrauenswürdige Elektronik Schott, Christian et al. 2022
15 Modular Probecard-Measurement Equipment for Automated Wafer-Level Characterization of High Precision MEMS Gyroscopes Weidlich, Sebastian et al. 2022
16 Nordsuche - Performance Demonstration für Präzisions-MEMS-Gyroskope Bülz, Daniel et al. 2022
17 Passive, frequency-selective piezoelectric MEMS with wake-up electronics for ultra-low-power vibration sensors Stoeckel, Chris* et al. 2022
18 Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors Stöckel, Chris* et al. 2022
19 The BDRIE-HS* Technology Approach for Tiny Motion Detection with Improved Sensitivity and Noise Performance Forke, Roman et al. 2022
20 Vibration sensors with a high bandwidth and low SNR, enhanced with post processing gap reduction Streit, Petra* et al. 2022
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