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Nr. Titel Autor Jahr
1 Nanolithographic waveguides, couplers and ring resonators made of Si3N4 and AlN for photonics and quantum technologies Wecker, Julia* et al. 2025
2 On the Feasibility of the BDRIE-HS* Technology for a MEMS Gyroscope Forke, Roman et al. 2025
3 Advancement in the Mems Gyroscope from a Vibrating Tuning Fork to a Tuned Ring with Comb Electrodes Forke, Roman et al. 2024
4 High Sensitivity Mode-Localized Ring Resonator With Tunable Sensitivity Tsukamoto, Takashiro et al. 2024
5 Mode Localization and Frequency Modulation Sensing Using Superposed in-Phase and Anti-Phase Oscillations Tsukamoto, Takashiro et al. 2024
6 Efficient Quadrature Suppression for Improved Performance of a MEMS Vibratory Gyroscope Forke, Roman et al. 2023
7 MEMS-Based Fingerprinting Architecture for Trustworthy Electronics Meinel, Katja et al. 2023
8 Optimal design of piezoelectric MEMS for vibration monitoring system with nanoionics zero-energy memory elements Shaporin, Alexey* et al. 2023
9 Storing MEMS Interfaces Without Electrical Auxiliary Energy for Long-Time Monitoring Hoffmann, Martin et al. 2023
10 Erhöhung des Aspektverhältnisses der industriellen XMB10-Technologie durch nachträgliche Reduktion des Elektrodenspalts mittels Zustellen und Verschweißen Künzel, Petra et al. 2022
11 High-G Acceleration Sensors for the Automotive Industry Pregl, Sebastian et al. 2022
12 MEMS-basierte Fingerprint-Architektur für Vertrauenswürdige Elektronik Schott, Christian et al. 2022
13 Modular Probecard-Measurement Equipment for Automated Wafer-Level Characterization of High Precision MEMS Gyroscopes Weidlich, Sebastian et al. 2022
14 Nordsuche - Performance Demonstration für Präzisions-MEMS-Gyroskope Bülz, Daniel et al. 2022
15 Passive, frequency-selective piezoelectric MEMS with wake-up electronics for ultra-low-power vibration sensors Stoeckel, Chris* et al. 2022
16 Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors Stöckel, Chris* et al. 2022
17 The BDRIE-HS* Technology Approach for Tiny Motion Detection with Improved Sensitivity and Noise Performance Forke, Roman et al. 2022
18 Vibration sensors with a high bandwidth and low SNR, enhanced with post processing gap reduction Streit, Petra* et al. 2022
19 Bestimmung der Himmelsrichtung mittels Präzisions-MEMS-Gyroskop in einem kompakten Gerät Bülz, Daniel et al. 2021
20 Compact Standalone North-finding Device based on MEMS Gyroscope and Maytagging Bülz, Daniel et al. 2021
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