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Nr. Titel Autor Jahr
1 Efficient Quadrature Suppression for Improved Performance of a MEMS Vibratory Gyroscope Forke, Roman et al. 2023
2 MEMS-Based Fingerprinting Architecture for Trustworthy Electronics Meinel, Katja et al. 2023
3 Optimal design of piezoelectric MEMS for vibration monitoring system with nanoionics zero-energy memory elements Shaporin, Alexey* et al. 2023
4 Storing MEMS Interfaces Without Electrical Auxiliary Energy for Long-Time Monitoring Hoffmann, Martin et al. 2023
5 Erhöhung des Aspektverhältnisses der industriellen XMB10-Technologie durch nachträgliche Reduktion des Elektrodenspalts mittels Zustellen und Verschweißen Künzel, Petra et al. 2022
6 High-G Acceleration Sensors for the Automotive Industry Pregl, Sebastian et al. 2022
7 MEMS-basierte Fingerprint-Architektur für Vertrauenswürdige Elektronik Schott, Christian et al. 2022
8 Modular Probecard-Measurement Equipment for Automated Wafer-Level Characterization of High Precision MEMS Gyroscopes Weidlich, Sebastian et al. 2022
9 Nordsuche - Performance Demonstration für Präzisions-MEMS-Gyroskope Bülz, Daniel et al. 2022
10 Passive, frequency-selective piezoelectric MEMS with wake-up electronics for ultra-low-power vibration sensors Stoeckel, Chris* et al. 2022
11 Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors Stöckel, Chris* et al. 2022
12 The BDRIE-HS* Technology Approach for Tiny Motion Detection with Improved Sensitivity and Noise Performance Forke, Roman et al. 2022
13 Vibration sensors with a high bandwidth and low SNR, enhanced with post processing gap reduction Streit, Petra* et al. 2022
14 Bestimmung der Himmelsrichtung mittels Präzisions-MEMS-Gyroskop in einem kompakten Gerät Bülz, Daniel et al. 2021
15 Compact Standalone North-finding Device based on MEMS Gyroscope and Maytagging Bülz, Daniel et al. 2021
16 Design and technology for uniform aluminum nitride piezoelectric micromachined ultrasonic transducers with radial array Stöckel, Chris et al. 2021
17 North finding with a single double mass MEMS gyroscope- A performance demonstrator Bülz, Daniel et al. 2021
18 Piezoelectric Scanning Micromirror With Built-In Sensors Based on Thin Film Aluminum Nitride Meinel, Katja* et al. 2021
19 Speichernde Sensorkonzepte mit in-memory-Computing, ganz ohne elektrische Hilfsenergie Hoffmann, Martin et al. 2021
20 2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based On Piezoelectric Thin Film Aluminum Nitride Meinel, Katja* et al. 2020
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