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Nr. Titel Autor Jahr
1 Advancement in the Mems Gyroscope from a Vibrating Tuning Fork to a Tuned Ring with Comb Electrodes Forke, Roman et al. 2024
2 High Sensitivity Mode-Localized Ring Resonator With Tunable Sensitivity Tsukamoto, Takashiro et al. 2024
3 Mode Localization and Frequency Modulation Sensing Using Superposed in-Phase and Anti-Phase Oscillations Tsukamoto, Takashiro et al. 2024
4 Efficient Quadrature Suppression for Improved Performance of a MEMS Vibratory Gyroscope Forke, Roman et al. 2023
5 MEMS-Based Fingerprinting Architecture for Trustworthy Electronics Meinel, Katja et al. 2023
6 Optimal design of piezoelectric MEMS for vibration monitoring system with nanoionics zero-energy memory elements Shaporin, Alexey* et al. 2023
7 Storing MEMS Interfaces Without Electrical Auxiliary Energy for Long-Time Monitoring Hoffmann, Martin et al. 2023
8 Erhöhung des Aspektverhältnisses der industriellen XMB10-Technologie durch nachträgliche Reduktion des Elektrodenspalts mittels Zustellen und Verschweißen Künzel, Petra et al. 2022
9 High-G Acceleration Sensors for the Automotive Industry Pregl, Sebastian et al. 2022
10 MEMS-basierte Fingerprint-Architektur für Vertrauenswürdige Elektronik Schott, Christian et al. 2022
11 Modular Probecard-Measurement Equipment for Automated Wafer-Level Characterization of High Precision MEMS Gyroscopes Weidlich, Sebastian et al. 2022
12 Nordsuche - Performance Demonstration für Präzisions-MEMS-Gyroskope Bülz, Daniel et al. 2022
13 Passive, frequency-selective piezoelectric MEMS with wake-up electronics for ultra-low-power vibration sensors Stoeckel, Chris* et al. 2022
14 Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors Stöckel, Chris* et al. 2022
15 The BDRIE-HS* Technology Approach for Tiny Motion Detection with Improved Sensitivity and Noise Performance Forke, Roman et al. 2022
16 Vibration sensors with a high bandwidth and low SNR, enhanced with post processing gap reduction Streit, Petra* et al. 2022
17 Bestimmung der Himmelsrichtung mittels Präzisions-MEMS-Gyroskop in einem kompakten Gerät Bülz, Daniel et al. 2021
18 Compact Standalone North-finding Device based on MEMS Gyroscope and Maytagging Bülz, Daniel et al. 2021
19 Design and technology for uniform aluminum nitride piezoelectric micromachined ultrasonic transducers with radial array Stöckel, Chris et al. 2021
20 North finding with a single double mass MEMS gyroscope- A performance demonstrator Bülz, Daniel et al. 2021
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