Springe zum Hauptinhalt
Universitätsbibliothek
Universitätsbibliographie

Ergebnis der Datenbankabfrage

Nr. Titel Autor Jahr
1 Impact of Dielectric and Copper Via Design on Wafer-to-Wafer Hybrid Bonding Dubey, Vikas* et al. 2023
2 Integration of (Poly-Si/Air)n Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer-Level MOEMS Fabrication Process Helke, Christian* et al. 2023
3 Verbesserte Prozessüberwachung durch hochsensitive CNT-Kraftaufnehmer Bonitz, Jens et al. 2020
4 Functional carbon nanotubes for MEMS applications: Miniaturized strain sensor and black coating for infrared devices Böttger, Simon et al. 2019
5 Adding CNT-based functionality to MEMS: A technology demonstration for strain and IR sensors on wafer scale Böttger, Simon et al. 2018
6 Scaling up Integration of Carbon Nanotubes into Micro-Electro-Mechanical Systems Böttger, Simon et al. 2018
7 A test device for in situ TEM investigations on failure behaviour of carbon nanotubes embedded in metals under tensile load Jöhrmann, Nathanael* et al. 2017
8 Scalable Fabrication of Carbon Nanotube Field-Effect Transistors Hermann, Sascha et al. 2017
9 A MEMS test stage for in situ testing of interfaces between carbon nanotubes and metals Hartmann, Steffen et al. 2016
10 An in situ tensile test device for thermo-mechanical characterisation of interfaces between carbon nanotubes and metals Hartmann, Steffen et al. 2016
11 Towards nanoreliability of sensors incorporating interfaces between single-walled carbon nanotubes and metals : molecular dynamics simulations and in situ experiments using electron microscopy Hartmann, Steffen* et al. 2016
12 Wafer-level technology for integration of carbon nanotubes into micro-electro-mechanical systems Bonitz, Jens et al. 2016
13 Carbon Nanotube based sensors in MEMS/NEMS Hermann, Sascha et al. 2015
14 Towards Nanoreliability of CNT based Sensor Applications: Investigations of Carbon Nanotube-Metal Interfaces Combining Molecular Dynamics Simulations, Advanced In-Situ Experiments and Analytics Hartmann, Steffen* et al. 2015
15 Carbon nanotubes for piezoresistive electro-mechanical transducers incorporating a wafer-level technology Hermann, Sascha et al. 2014
16 Integration and Functionalization of Carbon Nanotubes at the Wafer Level for Sensor Applications Hermann, Sascha et al. 2014
17 MEMS-Testeinrichtung für die Wafer-Level-Charakterisierung von integrierten Kohlenstoffnanoröhren Shaporin, Alexey et al. 2013
18 Wafer-level technology for piezoresistive electro-mechanical transducer based on Carbon Nanotubes Shaporin, Alexey et al. 2013
19 Wafer level approaches for the integration of carbon nanotubes in electronic and sensor applications Hermann, Sascha et al. 2012
20 Integration von Kohlenstoffnanoröhren für MEMS/NEMS Anwendungen Hermann, Sascha et al. 2010
Aktuelle Seite:
Anzahl der Ergebnisseiten: 2
Anzahl der Dokumente: 27

Soziale Medien

Verbinde dich mit uns: