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Nr. Titel Autor Jahr
1 Optimizing reticle based high throughput i-line grayscale projection lithography for 3D structures with low surface roughness Schermer, S.* et al. 2025
2 Investigations on Low-Temperature Aluminium Thermocompression Bonding Using Surface Passivation Technique Diex, Kevin et al. 2024
3 Investigations on low-temperature thermocompression bonding of passivated aluminum for enhanced wafer-level packaging and heterogeneous integration Diex, Kevin* et al. 2024
4 Scalable fabrication approach and fill factor optimization for single pixel microlens arrays Bonitz, Jens* et al. 2024
5 Impact of Dielectric and Copper Via Design on Wafer-to-Wafer Hybrid Bonding Dubey, Vikas* et al. 2023
6 Integration of (Poly-Si/Air)n Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer-Level MOEMS Fabrication Process Helke, Christian* et al. 2023
7 Verbesserte Prozessüberwachung durch hochsensitive CNT-Kraftaufnehmer Bonitz, Jens et al. 2020
8 Functional carbon nanotubes for MEMS applications: Miniaturized strain sensor and black coating for infrared devices Böttger, Simon et al. 2019
9 Adding CNT-based functionality to MEMS: A technology demonstration for strain and IR sensors on wafer scale Böttger, Simon et al. 2018
10 Scaling up Integration of Carbon Nanotubes into Micro-Electro-Mechanical Systems Böttger, Simon et al. 2018
11 A test device for in situ TEM investigations on failure behaviour of carbon nanotubes embedded in metals under tensile load Jöhrmann, Nathanael* et al. 2017
12 Scalable Fabrication of Carbon Nanotube Field-Effect Transistors Hermann, Sascha et al. 2017
13 A MEMS test stage for in situ testing of interfaces between carbon nanotubes and metals Hartmann, Steffen et al. 2016
14 An in situ tensile test device for thermo-mechanical characterisation of interfaces between carbon nanotubes and metals Hartmann, Steffen et al. 2016
15 Towards nanoreliability of sensors incorporating interfaces between single-walled carbon nanotubes and metals : molecular dynamics simulations and in situ experiments using electron microscopy Hartmann, Steffen* et al. 2016
16 Wafer-level technology for integration of carbon nanotubes into micro-electro-mechanical systems Bonitz, Jens et al. 2016
17 Carbon Nanotube based sensors in MEMS/NEMS Hermann, Sascha et al. 2015
18 Towards Nanoreliability of CNT based Sensor Applications: Investigations of Carbon Nanotube-Metal Interfaces Combining Molecular Dynamics Simulations, Advanced In-Situ Experiments and Analytics Hartmann, Steffen* et al. 2015
19 Carbon nanotubes for piezoresistive electro-mechanical transducers incorporating a wafer-level technology Hermann, Sascha et al. 2014
20 Integration and Functionalization of Carbon Nanotubes at the Wafer Level for Sensor Applications Hermann, Sascha et al. 2014
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