Eintrag in der Universitätsbibliographie der TU Chemnitz
Rothe, Tom* ; Sampura, Yasa ; Zienert, Andreas ; Langer, Jan ; Gottfried, Knut ; Streiter, Reinhard ; Schuster, Jörg ; Philipossian, Ara ; Kuhn, Harald
A Hybrid Chemical Mechanical Planarization (CMP) Model for Time-Dependent, Spatial Material Removal Rate Optimization
| Universität: | Technische Universität Chemnitz | |
| Institut 1: | Zentrum für Mikrotechnologien (ZfM) | |
| Institut 2: | Professur Smart Systems Integration | |
| Dokumentart: | Konferenzabstract | |
| URL/URN: | https://nccavs-usergroups.avs.org/wp-content/uploads/2023/01/ICPT22-Abstract-Session-A4-Rothe.pdf | |
| Quelle: | International Conference on Planarization Technology (ICPT), 2022 Sep 27-29, Portland, OR (USA), 2022 | |
Bemerkung: |
_MA!N_ |
