Ergebnis der Datenbankabfrage

Nr.	Titel	Autor	Jahr
1	Characterization of the ion angle distribution function in low-pressure plasmas using a micro-electromechanical system	Melzer, Marcel* et al.	2025
2	Technology for Piezoelectric Micromachined Ultrasonic Transducers with Adaptive Channel Geometry and Chip Size	Stoeckel, Chris et al.	2024
3	Passive, frequency-selective piezoelectric MEMS with wake-up electronics for ultra-low-power vibration sensors	Stoeckel, Chris* et al.	2022
4	Correction to: Co-Sputtering of Al1-xScxN Thin Films on Pt(111): a Characterization by Raman and IR Spectroscopies	Solonenko, Dmytro* et al.	2021
5	2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based On Piezoelectric Thin Film Aluminum Nitride	Meinel, Katja* et al.	2020
6	Co-sputtering of Al1−xScxN thin films on Pt(111): a characterization by Raman and IR spectroscopies	Solonenko, Dmytro* et al.	2020
7	Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride	Meinel, Katja et al.	2020
8	The Limits of the Post-Growth Optimization of AlN Thin Films Grown on Si(111) via Magnetron Sputtering	Solonenko, Dmytro* et al.	2020
9	Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride	Meinel, Katja et al.	2019
10	Piezoelectric Scanning Micromirror with Large Scan Angle Based on Thin Film Aluminum Nitride	Meinel, Katja et al.	2019
11	MEMS based IEDF/IADF sensing: Kinetic analysis of the ion dynamics inside the sensor	Roessel, Kerstin et al.	2018