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Nr. Titel Autor Jahr
1 Characterisation of the barrier formation process of self-forming barriers with CuMn, CuTi and CuZr alloys Franz, Mathias* et al. 2016
2 Precise determination of piezoelectric longitudinal charge coefficients for piezoelectric thin films assisted by finite element modeling Stöckel, Chris et al. 2014
3 The History of Micro Mirror Fabrication at the Center of Microtechnologies Kaufmann, Christian 2014
4 Analysis of metal-metal contacts in RF MEMS switches Kurth, Steffen et al. 2013
5 Highly Reliable and Low Voltage Actuated Ohmic RF MEMS Switch with Wafer Level Packaging Kurth, Steffen et al. 2013
6 MEMS-Testeinrichtung für die Wafer-Level-Charakterisierung von integrierten Kohlenstoffnanoröhren Shaporin, Alexey et al. 2013
7 Wafer-level technology for piezoresistive electro-mechanical transducer based on Carbon Nanotubes Shaporin, Alexey et al. 2013
8 HF-MEMS Schalter mit ohmschen Kontakt und lateraler Bewegungsrichtung Leidich, Stefan et al. 2011
9 Reliability enhancement of Ohmic RF MEMS switches Kurth, Steffen et al. 2011
10 Image based test methodology for laser display scanners Specht, Hendrik et al. 2010
11 Micro/nano technologies towards smart systems integration Gessner, Thomas et al. 2010
12 Technologie zur Integration von Kohlenstoffnanoröhren für Inertialsensoren Bonitz, Jens et al. 2010
13 Deformation Measurements of High-Speed MEMS With Combined Two-Wavelength Single-Pulse Digital Holography and Single Phase Reconstruction Using Subpicosecond Pulses Hansel, Thomas et al. 2009
14 Performance and Reliability Test of MEMS Optical Scanners Kurth, S. et al. 2009
15 Synthesized femtosecond laser pulse source for two-wavelength contouring with simultaneously recorded digital holograms Hansel, Thomas et al. 2009
16 A MEMS Friction Vacuum Gauge Tenholte, Dirk et al. 2008
17 Laser Trimming of Micro Mirror Devices. : Ultrashort UV-Laserpulses Allow Ultra-precise Processing. Haenel, Jens et al. 2008
18 Reliability of MEMS Devices in Shock and Vibration Overload Situation Kurth, Steffen et al. 2008
19 Ein MEMS Vakuumsensor nach dem Reibungsprinzip Tenholte, Dirk et al. 2007
20 Hochreflektiver mikromechanischer Scanner für Materialbearbeitung und medizinische Anwendungen Bonitz, Jens et al. 2007
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