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Nr. Titel Autor Jahr
1 CNT-PUFs: Highly Robust and Heat-Tolerant Carbon-Nanotube-Based Physical Unclonable Functions Frank, Florian et al. 2023
2 Development of an e-beam/i-line stepper intra-level mix and match approach with the photoresist mr-EBL 6000.5 for PIC related structures such as waveguides, ring resonators and coupling structures Reinhardt, Markus et al. 2023
3 Impact of Dielectric and Copper Via Design on Wafer-to-Wafer Hybrid Bonding Dubey, Vikas* et al. 2023
4 Integration of (Poly-Si/Air)n Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer-Level MOEMS Fabrication Process Helke, Christian* et al. 2023
5 Intra-level mix and match lithography with electron beam lithography and i-line stepper combined with resolution enhancement for structures below the CD-limit Helke, Christian* et al. 2023
6 Multichannel laser diode to polymer waveguide array coupling with a double-aspheric lens Kunze, Katharina* et al. 2023
7 Tunable Fabry-Pérot interferometer integrated in a silicon waveguide of an on-chip optical platform for long infrared wavelengths Wecker, Julia et al. 2023
8 Fabrication of Nanoimprint-Lithography masters for optical nano gratings Helke, Christian et al. 2022
9 High-resolution projection lithography for MEMS-applications using thick photoresist AZ 10XT Schermer, Sebastian et al. 2022
10 Integration von thermosensitiven Polymeren in nanoskalige Kanäle zur Realisierung von mikrofluidischen Schaltungen Bickmann, Ch. et al. 2022
11 Lithographic performance of resist ma-N 1402 in an e-beam/i-line stepper intra-level mix and match approach Canpolat-Schmidt, Cansu Hanim et al. 2022
12 On the Fabrication and Characterization of Polymer-Based Waveguide Probes for Use in Future Optical Cochlear Implants Helke, Christian* et al. 2022
13 The BDRIE-HS* Technology Approach for Tiny Motion Detection with Improved Sensitivity and Noise Performance Forke, Roman et al. 2022
14 Bridging the gap: Perspectives of nanofabrication technologies for application-oriented research Baum, Mario* et al. 2021
15 Herstellung von neuartigen Reflektorsystemen und Erarbeitung einer systembezogenen Integrationstechnologie für VIS und IR Fabry-Pérot Interferometer Helke, Christian 2019
16 Integration of plasmonic nanostructures for micro-opto-electromechanical-systems Heldt, Georg et al. 2019
17 Mikro- und Nanotechnologien zur Herstellung steuerbarer optischer Filter Hiller, Karla et al. 2019
18 Nanostructured al SWG Reflectors on thin LP-Si3N4 Membranes as (TiO2/SiO2)³ Bragg Reflector Alternative for Vis Fabry-Pérot Interferometers Helke, Christian* et al. 2019
19 Next Generation of Highly Miniaturized Bulk-Mems Fabry-Pérot Filters For Infrared Microspectrometers Ebermann, Martin* et al. 2019
20 Parameter dependency of DNA origami immobilization at micro- and nano structured CF polymer surfaces on SiO2 Hann, Julia* et al. 2019
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