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Nr. Titel Autor Jahr
1 2.5D-patterning via i-line grayscale exposure for photonic structures and micro lens arrays Schermer, Sebastian et al. 2024
2 Aluminum-nitride-based modular photonic integrated circuit technology and characterization platform (PIC-TCP) Tank, Franz et al. 2024
3 Characterization of negative tone photoresist mr-EBL 6000.5 for i-line stepper and electron beam lithography for the Intra-Level Mix & Match Approach Schermer, Sebastian* et al. 2024
4 Characterization of Thin AlN/Ag/AlN-Reflector Stacks on Glass Substrates for MEMS Applications Behl, Christian* et al. 2024
5 Combining nano-scale imprint lithography and reactive ion etching to fabricate high-quality surface relief gratings Haase, Micha et al. 2024
6 Fabrication of switchable biocompatible, nano-fluidic devices using a thermoresponsive polymer on nano-patterned surfaces Bickmann, Christopher* et al. 2024
7 Impact of Dielectric Types on Surface Topography for Wafer-Level Hybrid Bonding Dubey, Vikas* et al. 2024
8 Navigating Complex Process and Design Challenges in Hybrid Bonding for Advanced Semiconductor Integration: A Comprehensive Analysis Dubey, Vikas* et al. 2024
9 Scalable fabrication approach and fill factor optimization for single pixel microlens arrays Bonitz, Jens* et al. 2024
10 CNT-PUFs: Highly Robust and Heat-Tolerant Carbon-Nanotube-Based Physical Unclonable Functions Frank, Florian et al. 2023
11 Development of an e-beam/i-line stepper intra-level mix and match approach with the photoresist mr-EBL 6000.5 for PIC related structures such as waveguides, ring resonators and coupling structures Reinhardt, Markus et al. 2023
12 Impact of Dielectric and Copper Via Design on Wafer-to-Wafer Hybrid Bonding Dubey, Vikas* et al. 2023
13 Integration of (Poly-Si/Air)n Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer-Level MOEMS Fabrication Process Helke, Christian* et al. 2023
14 Intra-level mix and match lithography with electron beam lithography and i-line stepper combined with resolution enhancement for structures below the CD-limit Helke, Christian* et al. 2023
15 Multichannel laser diode to polymer waveguide array coupling with a double-aspheric lens Kunze, Katharina* et al. 2023
16 Tunable Fabry-Pérot interferometer integrated in a silicon waveguide of an on-chip optical platform for long infrared wavelengths Wecker, Julia et al. 2023
17 Fabrication of Nanoimprint-Lithography masters for optical nano gratings Helke, Christian et al. 2022
18 High-resolution projection lithography for MEMS-applications using thick photoresist AZ 10XT Schermer, Sebastian et al. 2022
19 Integration von thermosensitiven Polymeren in nanoskalige Kanäle zur Realisierung von mikrofluidischen Schaltungen Bickmann, Ch. et al. 2022
20 Lithographic performance of resist ma-N 1402 in an e-beam/i-line stepper intra-level mix and match approach Canpolat-Schmidt, Cansu Hanim et al. 2022
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Anzahl der Ergebnisseiten: 3
Anzahl der Dokumente: 51

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