Eintrag in der Universitätsbibliographie der TU Chemnitz
Selbmann, Franz ; Baum, Mario ; Meinecke, Christoph ; Wiemer, Maik ; Otto, Thomas ; Joseph, Yvonne
Parylene C Based Adhesive Bonding on 6" and 8" Wafer Level for the Realization of Highly Reliable and Fully Biocompatible Microsystems
| Universität: | Technische Universität Chemnitz | |
| Institut 1: | Zentrum für Mikrotechnologien (ZfM) | |
| Institut 2: | Professur Smart Systems Integration | |
| Dokumentart: | Artikel in Fachzeitschrift, referiert | |
| ISBN/ISSN: | 1938-6737 ; 1938-5862 | |
| DOI: | doi:10.1149/09804.0055ecst | |
| URL/URN: | https://iopscience.iop.org/article/10.1149/09804.0055ecst/pdf | |
| Quelle: | ECS Transactions (full-text content of proceedings from ECS meetings and ECS-sponsored meetings). - IOP Publishing Ltd. - 98. 2020, 4, pp. 55 - 66, 2020 | |
Bemerkung: |
_MA!N_ |
