Eintrag in der Universitätsbibliographie der TU Chemnitz
Waechtler, Thomas ; Mueller, Steve ; Hofmann, Lutz ; Mothes, Robert ; Ding, Shao-Feng ; Schulz, Stefan E. ; Lang, Heinrich ; Qu, Xin-Ping ; Gessner, Thomas
Copper films grown via copper oxide ALD integrated with different liner materials for interconnect applications
| Universität: | Technische Universität Chemnitz | |
| Institut 1: | Zentrum für Mikrotechnologien (ZfM) | |
| Institut 2: | Professur Smart Systems Integration | |
| Dokumentart: | Konferenzabstract | |
| URL/URN: | http://www2.avs.org/conferences/ALD/2011/index.html | |
| Quelle: | 11th International Conference on Atomic Layer Deposition, Cambridge, Massachusetts (USA), 2011 Jun 26-29; Oral Presentation; Proceedings DVD-ROM, 2011 |
