Eintrag in der Universitätsbibliographie der TU Chemnitz
Bräuer, Jörg ; Tomoscheit, Eric ; Hertel, S. ; Besser, Jan ; Wiemer, Maik ; Gessner, Thomas
Hermetic and Room-Temperature Wafer-Level-Packaging Based on Nanoscale Energetic Systems
| Universität: | Technische Universität Chemnitz | |
| Institut: | Professur Smart Systems Integration | |
| Dokumentart: | Konferenzabstract | |
| URL/URN: | http://www2.avs.org/conferences/icmctf/pdfs/abstracts.pdf | |
| Quelle: | ICMCTF (International Conference on Metallurgical Coatings and Thin Films), San Diego, CA, 2013 April 29 - May 3; Proceedings, Invited Talk | |
| Freie Schlagwörter (Englisch): | Nanomanufacturing , MEMS , Reactive bonding , wafer bonding |
