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Nr.	Titel	Autor	Jahr
1	Comparison of two types of silicon nitride grating couplers for 1550nm wavelength with slots and square holes and different deposition methods	Schumann, Anne-Katrin* et al.	2025
2	Nanolithographic waveguides, couplers and ring resonators made of Si3N4 and AlN for photonics and quantum technologies	Wecker, Julia* et al.	2025
3	Optomechanical Inertial Sensors Based on Ring Resonators: Design Approaches and Technology	Shaporin, Alexey et al.	2025
4	Aluminum-nitride-based modular photonic integrated circuit technology and characterization platform (PIC-TCP)	Tank, Franz et al.	2024
5	Characterization of negative tone photoresist mr-EBL 6000.5 for i-line stepper and electron beam lithography for the Intra-Level Mix & Match Approach	Schermer, Sebastian* et al.	2024
6	High precision electrostatic MEMS actuators for in-plane Fabry-Pérot gas sensors	Shaporin, Alexey* et al.	2024
7	Tunable Fabry-Pérot interferometer integrated in a silicon waveguide of an on-chip optical platform for long infrared wavelengths	Wecker, Julia et al.	2023
8	Multi-Mode Silicon Waveguides at Long Infrared Wavelengths	Wecker, Julia et al.	2022
9	A MEMS IR optical chopper based on subwavelength structures	Kurth, Steffen et al.	2019
10	Functional Integration - Structure-Integrated Wireless Sensor Technology Targeting Smart Mechanical Engineering Applications	Rülke, Steffen et al.	2018
11	Millimeterwellen-Sensorsystem zur Messung der Sauerstoffkonzentration in Gasen	Wecker, Julia et al.	2017
12	Oxygen detection system consisting of a millimeter wave Fabry-Pérot resonator and an integrated SiGe front-end	Wecker, Julia et al.	2016
13	Tunable Fabry-Pérot interferometer with subwavelength grating reflectors for MWIR microspectrometers	Meinig, Marco et al.	2016
14	Oxygen Detection by Rotational Spectroscopy with a Small Size Millimeter Wave Resonator	Wecker, Julia et al.	2015

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Anzahl der Dokumente:	14