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Nr. Titel Autor Jahr
1 Aluminum-nitride-based modular photonic integrated circuit technology and characterization platform (PIC-TCP) Tank, Franz et al. 2024
2 Characterization of negative tone photoresist mr-EBL 6000.5 for i-line stepper and electron beam lithography for the Intra-Level Mix & Match Approach Schermer, Sebastian* et al. 2024
3 High precision electrostatic MEMS actuators for in-plane Fabry-Pérot gas sensors Shaporin, Alexey* et al. 2024
4 Tunable Fabry-Pérot interferometer integrated in a silicon waveguide of an on-chip optical platform for long infrared wavelengths Wecker, Julia et al. 2023
5 Multi-Mode Silicon Waveguides at Long Infrared Wavelengths Wecker, Julia et al. 2022
6 A MEMS IR optical chopper based on subwavelength structures Kurth, Steffen et al. 2019
7 Functional Integration - Structure-Integrated Wireless Sensor Technology Targeting Smart Mechanical Engineering Applications Rülke, Steffen et al. 2018
8 Millimeterwellen-Sensorsystem zur Messung der Sauerstoffkonzentration in Gasen Wecker, Julia et al. 2017
9 Oxygen detection system consisting of a millimeter wave Fabry-Pérot resonator and an integrated SiGe front-end Wecker, Julia et al. 2016
10 Tunable Fabry-Pérot interferometer with subwavelength grating reflectors for MWIR microspectrometers Meinig, Marco et al. 2016
11 Oxygen Detection by Rotational Spectroscopy with a Small Size Millimeter Wave Resonator Wecker, Julia et al. 2015
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