Ergebnis der Datenbankabfrage
| Nr. | Titel | Autor | Jahr |
|---|---|---|---|
| 1 | Advancement in the Mems Gyroscope from a Vibrating Tuning Fork to a Tuned Ring with Comb Electrodes | Forke, Roman et al. | 2024 |
| 2 | High Sensitivity Mode-Localized Ring Resonator With Tunable Sensitivity | Tsukamoto, Takashiro et al. | 2024 |
| 3 | Mode Localization and Frequency Modulation Sensing Using Superposed in-Phase and Anti-Phase Oscillations | Tsukamoto, Takashiro et al. | 2024 |
| 4 | Investigation of Surface Pre-Treatment Methods for Wafer-Level Cu-Cu Thermo-Compression Bonding | Tanaka, Koki et al. | 2016 |
| 5 | Evaluation of sputtered Pd76Cu6Si18 metallic glass for MEMS application | Vogel, Klaus et al. | 2015 |
| 6 | Solid Liquid Interdiffusion Bonding for Micro Devices near Room Temperature | Frömel, Jörg et al. | 2013 |
| Anzahl der Ergebnisseiten: | 1 |
| Anzahl der Dokumente: | 6 |
