Ergebnis der Datenbankabfrage
Nr. | Titel | Autor | Jahr |
---|---|---|---|
1 | Cost-effective equipment for surface pre-treatment for cleaning and excitation of substrates in semiconductor technology | Weber, Dominik et al. | 2022 |
2 | Numerical Characterization and Experimental Verification of an In-Plane MEMS-Actuator with Thin-Film Aluminum Heater | Meszmer, Peter* et al. | 2014 |
3 | Piezoresistive force sensor and thermal actuators usage as applications to nanosystems manipulation: Design, simulations, technology and experiments | Schondelmaier, Gianina et al. | 2013 |
Anzahl der Ergebnisseiten: | 1 |
Anzahl der Dokumente: | 3 |