Eintrag in der Universitätsbibliographie der TU Chemnitz
Volltext zugänglich unter
URN: urn:nbn:de:bsz:ch1-qucosa2-951682
Huber, Renato
Schmidt, Oliver G. ; Fery, Andreas (Gutachter)
High-Yield Wafer-Scale Self-Assembly of 3D Microelectronic Devices for Electron Optics
Kurzfassung in englisch
Parallel fabrication of 3D self-assembled micro coils has been carried out, providing the basis for micro electromagnetic elements capable of shaping and modulating an electron beam with an adjustable magnetic field. The self-assembled micro coils were fabricated in parallel using a polymer technology demonstrated on a 6-inch wafer. The parallel process also successfully integrates the Bosch's deep silicon etching process to open an aperture for the electron beam. An 88% yield was achieved in this parallel process. The individual fabricated devices were tailored to fulfil various electron optical functions, including deflectors, lenses, and phase plates. Given their small dimensions, these devices were retrofitted into an existing transmission electron microscope. A static deflection in the mrad regime was observed for 300 kV electrons. In addition, 2D deflectors for the electron beam were fabricated to allow blanking, 2D scanning and a proof of concept for stroboscopic experiments. Useful electron beam deflection was observed up to a frequency of 100 MHz. The focusing devices used magnetic quadrupole schemes and achieved focal lengths of as little as 46 mm for 300 kV electrons. In addition, phase plate devices have been developed that can shift the phase of the 300 keV electron beam in the azimuthal direction up to several 1000 π rad. These elements indicate the practicality of miniaturizing electron optical components for a variety of applications, including multibeam instruments, miniaturized electron optical instruments, stroboscopic measurement setups, and the in-situ application of a tunable magnetic field.
| Universität: | Technische Universität Chemnitz | |
| Institut: | Professur Materialsysteme der Nanoelektronik | |
| Fakultät: | Fakultät für Elektrotechnik und Informationstechnik | |
| Dokumentart: | Dissertation | |
| Betreuer: | Schmidt, Oliver G. | |
| DOI: | doi:10.60687/2025-0003 | |
| SWD-Schlagwörter: | Mikroelektronik , Selbstorganisation , Elektronenstrahl , Mikrosystemtechnik , Mikromagnetismus , Fotolithografie | |
| Freie Schlagwörter (Englisch): | shapeable electronics , electron optics , self-assembly , wafer-scale fabrication , micro electromagnet | |
| DDC-Sachgruppe: | 621.3 ; 502.825 ; 621.3815 | |
| Sprache: | englisch | |
| Tag der mündlichen Prüfung | 04.03.2024 | |
| OA-Lizenz | CC BY-SA 4.0 |
