Eintrag in der Universitätsbibliographie der TU Chemnitz
Volltext zugänglich unter
URN: urn:nbn:de:bsz:ch1-qucosa2-835021
Moradi, Somayeh
Schmidt, Oliver G. ; Wunderle, Bernhard (Gutachter)
Mechanically stable and extremely compact rolled-up microtubes by a novel dry rolling technology
Kurzfassung in englisch
Rolled-up nanotechnology has been proved as an elegant approach that autonomously rearranges planar nanomembranes made of virtually any kind of material into three dimensional micro- and nanotubular architectures by built-in differential strain fields and a simple rolling process. This thesis addresses the new advances in the rolled-up nanotechnology by demonstrating a novel dry rolling technique that revolutionizes configuration of the rolled-up structures. The novel rolling method is relying on hiring an anti-adhesion polymeric layer and heat-activation rolling step. The capability of this rolling platform to precisely control interfacial defects and tightness level of the alternating layers in the rolled-up microtubes, enables creating highly symmetric and extremely compact multiple winding rolled-up microstructures. A systematic structural investigation on the multi-winding rolled-up structures using both qualitative and quantitative approaches is done. New structural analysis metrics including angle of tight windings sector and circularity degree of the rolled-up microtubes are defined.A comprehensive mechanical characterization by applying both experimental and numerical simulation analysis is presented to evaluate mechanical stability and deformation behavior of the rolled-up structures fabricated by the novel approach. Mechanical analysis is carried out using an in-situ SEM depth-sensing nanoindentation system. Non-linear finite element analysis (FEA) analysis is applied to predict and compare mechanical behavior of the rolled-up microtubes. The effect of three geometrical parameters including number of windings, compactness level of the alternating windings and inner diameter on mechanical behavior of the rolled-up microtubes as well as mechanical bendability of the free-standing microtubes fabricated by this technique is described.
Compatibility of the proposed rolling technique with standard micro-fabrication processes such as optical lithography process is evaluated to fabricate rolled-up structures with any specific dimension and geometry and to precisely define number of windings. Moreover, different strategies to control direction of the rolling process in this heat-induced technique are described.
A simple method to fabricate flexible, mechanically robust and reusable SU-8 shadow masks combined with a fast alignment technique based on SU-8 pillars is reported for the realization of the multi-layer micropatterning process. The capability of the proposed SU-8 shadow mask for wafer scale micropatterning processes as well as micropatterning on polymeric thin films is evaluated. A simple and time-efficient wet chemistry rolling process using a new sacrificial layer to fabricate large-area rolled-up capacitor structures is introduced.
| Universität: | Technische Universität Chemnitz | |
| Institut: | Professur Materialsysteme der Nanoelektronik | |
| Fakultät: | Fakultät für Elektrotechnik und Informationstechnik | |
| Dokumentart: | Dissertation | |
| Betreuer: | Schmidt, Oliver G. | |
| URL/URN: | https://nbn-resolving.org/urn:nbn:de:bsz:ch1-qucosa2-835021 | |
| SWD-Schlagwörter: | Nanotechnologie , Mikrostruktur | |
| Freie Schlagwörter (Englisch): | rolled-up nanotechnology , strain engineering , dry rolling mechanism , anti-adhesion , FC layer , hydrophobic surface , heat-activation rolling , winding compactness , symmetric , free-standing microtube , nanoindentation , mechanical deformation , simulation analysis , rolling direction , micropatterning , SU-8 shadow mask , fast alignment technique , sacrificial layer , capacitor plates | |
| DDC-Sachgruppe: | 620.5072 | |
| Sprache: | englisch | |
| Tag der mündlichen Prüfung | 21.11.2022 |
