Eintrag in der Universitätsbibliographie der TU Chemnitz
Volltext zugänglich unter
URN: urn:nbn:de:bsz:ch1-qucosa2-826308
Li, Yang
Schmidt, Oliver G. (Prof. Dr. Dr. h.c.) ; Weng, Qunhong (Prof. Dr.) ; Kanoun, Olfa (Prof. Dr.) (Gutachter)
Swiss-Roll Microbattery: Design, Fabrication, and Integration
Kurzfassung in englisch
Microbatteries are being considered as the critical components for portable and smart microelectronics, including remote sensors, micro-electromechanical systems, microrobots, implantable medical devices, and the Internet of Things, owing to their high energy densities, long life span, and facile on-chip integration. To date, tremendous efforts have been devoted to developing new methodologies for building high-performance microbatteries with minimum footprint areas. However, an effective and reliable fabrication procedure that is compatible with the modern microelectronics industry has not yet been reported for microbatteries so far. Two main issues need to be considered for the device design: (1) pursuing satisfying energy and power densities at limited footprint area is highly desired by constructing the 3D microelectrode architecture with high aspect ratio while reducing its footprint; (2) a novel technology is highly demanded to produce the 3D microstructure following an on-chip processing route which is compatible with the manufacturing procedure of microelectronic devices.Rolled-up nanotechnology can transform a large-area planar precursor into a micrometer-sized Swiss-roll by careful strain-engineering and state-of-the-art micro-patterning techniques with a micro-origami self-assembly process, which reduces the device size for monolithic integration. This dissertation demonstrates brand-new 3D Swiss-roll microbatteries with high performance at a sub-square millimeter-scale by employing rolled-up nanotechnology. Two types of micro-batteries with different configurations have been designed and fabricated, including twin Swiss-roll and single Swiss-roll structures.
The twin Swiss-roll microbattery is fabricated based on two separated Swiss-roll micro-scaffolds with a parallel structure and controllable distance between them. The tuneable mesostructure benefits the mass loading of electroactive materials, rendering the excellent energy density at a greatly reduced footprint area. The twin Swiss-roll configuration is conducive to compatibility with novel battery chemistries due to its separated parallel Swiss-roll structure. In order to further decrease the overall footprint area, a single Swiss-roll configuration is designed for a fully integrated Swiss-roll microbattery. Micro-anode and micro-cathode are integrated into a single Swiss-roll configuration with an extremely small footprint area, which benefits the integration and miniaturization of microelectronics. Finally, an integrated device composed of a single Swiss-roll microbattery and UV photodetector is successfully fabricated within 1 mm2. The concept presented here enables the high-performance microbattery that can break through the limitation on microbattery’s footprint area, which opens up the new vision for the future on-chip microelectronics.
| Universität: | Technische Universität Chemnitz | |
| Institut: | Professur Materialsysteme der Nanoelektronik | |
| Fakultät: | Fakultät für Elektrotechnik und Informationstechnik | |
| Dokumentart: | Dissertation | |
| Betreuer: | Schmidt, Oliver G. (Prof. Dr. Dr. h.c.) | |
| URL/URN: | https://nbn-resolving.org/urn:nbn:de:bsz:ch1-qucosa2-826308 | |
| SWD-Schlagwörter: | Mikrobatterie , Energiespeicher , Miniaturisierung , Integration | |
| Freie Schlagwörter (Englisch): | microbattery , energy storage , miniaturization , integration | |
| DDC-Sachgruppe: | 621.3 | |
| Sprache: | englisch | |
| Tag der mündlichen Prüfung | 07.12.2022 |
