Eintrag in der Universitätsbibliographie der TU Chemnitz
Volltext zugänglich unter
URN: urn:nbn:de:bsz:ch1-qucosa2-799535
Saggau, Christian Niclaas
Schmidt, Oliver G. (Prof. Dr.) ; Fomin, Vladimir M. (Prof. Dr.) (Gutachter)
High Quality Rolled-Up Microstructures Enabled by Silicon Dry Release Technologies
Hochqualitative aufgerollte Mikrostrukturen via trockener Silizium Ätztechnologien
Kurzfassung in englisch
Micro-technology relies on a highly parallel fabrication of 2D electronic and/or microelectromechanical devices, where in most cases silicon wafers are used as substrates. In contrast 3D fabrication shows unique advantages, such as footprint reduction or the possibility to obtain additional functionalities. For example, in the case of a sensor, knowledge of the acceleration in all possible directions, the surrounding electric or magnetic field among other quantities can help to determine the exact position of an object in 3D space. To do that it is crucial to retrieve all components of a vector field, which requires at least one out of plane component. In other fields like integrated optics three dimensional structures can enhance the coupling efficiency with free space interactions. As such 3D micro-structures will be crucial for upcoming products and devices. A highly parallel fabrication is required to enable mass-adaption, self-assembly is an emerging technology that could deliver this purpose. Examples of 3D structures created by self-assembly include polyhedrons like cubes, pyramids or micro tubular structures such as tubes orspirals. Following a self assembly scheme, 3D devices would be created through the fabrication of standard 2D structures that are reshaped through a self-assembly step into a 3D object.
In this thesis a novel dry release protocol was developed to roll-up strained nanomembranes from a silicon sacrificial layer employing dry fluorine chemistry. This way a wet release is totally circumvented thus preventing damage of the created structures due to turbulent flow or capillary forces. Additionally the developed process enabled the use of standard CMOS deposition and processing tools, leading to a high increase in yield and quality, with yields exceeding 99% for microtubes. Building on the developed technology various devices where fabricated, for example rolled-up micro capacitors at a wafer scale with an increased yield and a low spread of electrical characteristics. For the E12 industrial standard more than 90% of devices behaved within the required performance characteristics. Furthermore the yield and Q-factor of roll-up whispering gallery mode resonators was strongly improved, making it possible to self assemble 3D coupled photonic molecules, which showed a mode splitting exceeding the FSR, as well as hybrid
supermodes at points of energy degeneracy.
| Universität: | Technische Universität Chemnitz | |
| Institut: | Professur Materialsysteme der Nanoelektronik | |
| Fakultät: | Fakultät für Naturwissenschaften | |
| Dokumentart: | Dissertation | |
| Betreuer: | Schmidt, Oliver G. (Prof. Dr.) | |
| SWD-Schlagwörter: | Whispering gallery resonator , Interferenz |
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| Freie Schlagwörter (Englisch): | rolled-up technology , nanomembranes , dry release,micro-capacitors,whispering gallery mode resonators , photonic molecules , self assembly , strain engineering | |
| DDC-Sachgruppe: | Naturwissenschaften und Mathematik, Physik, Licht, Infrarot- und Ultraviolettphänomene, Elektrizität, Elektronik | |
| Sprache: | englisch | |
| Tag der mündlichen Prüfung | 16.03.2022 | |
| OA-Lizenz | CC BY 4.0 |
