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Eintrag in der Universitätsbibliographie der TU Chemnitz

Volltext zugänglich unter
URN: urn:nbn:de:bsz:ch1-qucosa2-724636


Pousaneh, Elaheh
Lang, Heinrich (Prof. Dr.) ; Armbrüster, Marc (Prof. Dr.) (Gutachter)

Synthesis and Characterization of Metal Complexes for Thin Film Formation via Spin-Coating or Chemical Vapor Deposition


Kurzfassung in englisch

The present thesis describes the synthesis and characterization of magnesium, copper, and iron complexes and their application in the MOCVD (Metal-Organic Chemical Vapor Deposition) process, as well as the synthesis and characterization of yttrium and gadolinium complexes and their use as spin-coating precursors for metal oxide thin layer formation. The objective of this scientific work is the development of the family of bis(β-ketoiminato) magnesium(II) complexes and a series of heteroleptic β-ketoiminato copper(II) precursors for the formation of magnesium oxide and copper/copper oxide layers by using the MOCVD process. Modifications of the ketoiminato ligands affect the physical and chemical properties of the respective complexes. Another central theme of this work is the development of β-diketonato iron(III) complexes for the deposition of carbon-free gamma- and alpha-Fe2O3 layers via MOCVD. The thermal behavior and vapor pressure of the precursors could be influenced by the variation of the β-diketonate ligands. In addition, the synthesis and characterization of yttrium and gadolinium β-diketonates and their use as spin-coating precursors are described. Field-effect transistors were successfully fabricated by the deposition of carbon nanotubes on top of the Y2O3 films.

Universität: Technische Universität Chemnitz
Institut: Professur Anorganische Chemie
Fakultät: Fakultät für Naturwissenschaften
Dokumentart: Dissertation
Betreuer: Lang, Heinrich (Prof. Dr.)
URL/URN: https://nbn-resolving.org/urn:nbn:de:bsz:ch1-qucosa2-724636
SWD-Schlagwörter: Magnesiumoxid , Kupfer , Kupferoxid , Eisenoxide , Yttriumoxid , Dünne Schicht
Freie Schlagwörter (Englisch): MOCVD , Magnesium(II) β-ketoiminate , Magnesium oxide , Copper(II) β-ketoiminate , Copper/Copper oxide , Iron(III) β-diketonate , Solid-State Structure , Iron oxide , Spin-coating , Yttrium β-diketonate , Gadolinium β-diketonate , Yttrium oxide , Thin film , Field-effect transistor
DDC-Sachgruppe: Chemie
Sprache: englisch
Tag der mündlichen Prüfung 24.09.2020

 

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