Eintrag in der Universitätsbibliographie der TU Chemnitz
Gossler, Christian ; Schwarz, Ulrich T. ; Ruther, Patrick
Method for producing a micro-LED matrix, micro-LED matrix and use of a micro-LED matrix
Kurzfassung in englisch
A method for producing a micro-LED matrix by (A) depositing an LED layer structure onto a working substrate; (B) singulating a plurality of LED structures from the LED layer structure on the working substrate; (C) applying a first contact-making structure to a carrier substrate; and (D) transferring the plurality of LED structures from the working substrate to the carrier substrate by bonding and laser lift-off. An at least two-layered carrier substrate is used, including a carrier layer and a first flexible polymer layer, in step C the first contact-making structure is applied indirectly or directly to a side of the first polymer layer which faces away from the carrier layer, and in an additional method step D-0 between method steps C and D, a second flexible polymer layer is formed at least between the singulated LED structures. A micro-LED matrix and use are also provided.
| Universität: | Technische Universität Chemnitz | |
| Institut: | Professur Experimentelle Sensorik | |
| Dokumentart: | Patent (Offenlegungsschrift, Patentschrift, Gebrauchsmusterschrift) | |
| Veröffentlichungsnummer: | US10276631B2 | |
| Veröffentlichungsdatum | 30.04.2019 | |
| Internationale Patentklassifikation | H01L 33/00 (2010.01), H01L 29/18 (2006.01) | |
| Nachanmeldungen in anderen Staaten | DE102012217957 |
