Eintrag in der Universitätsbibliographie der TU Chemnitz
Bergbauer, Bettina
Horstmann, John Thomas (Prof. Dr.-Ing. habil.) ; Strüder, Lothar (Prof. Dr.) (Gutachter)
Study of macroscopic and microscopic homogeneity of DEPFET X-ray detectors
Kurzfassung in englisch
For the X-ray astronomy project Advanced Telescope for High ENergy Astrophysics (Athena) wafer-scale DEpleted P-channel Field Effect Transistor (DEPFET) detectors are proposed as Focal Plane Array (FPA) for the Wide Field Imager (WFI). Prototype structures with different pixel layouts, each consisting of 64 x 64 pixels, were fabricated to study four different DEPFET designs. This thesis reports on the results of the electrical and spectroscopic characterization of the different DEPFET designs. With the electrical qualification measurements the transistor properties of the DEPFET structures are investigated in order to determine whether the design intentions are reflected in the transistor characteristics. In addition, yield and homogeneity of the prototypes can be studied on die, wafer and batch level for further improvement of the production technology with regard to wafer-scale devices. These electrical characterization measurements prove to be a reliable tool to preselect the best detector dies for further integration into full detector systems. The spectroscopic measurements test the dynamic behavior of the designs as well as their spectroscopic performance. In addition, it is revealed how the transistor behavior translates into the detector performance. This thesis, as the first systematic study of different DEPFET designs on die and detector level, shows the limitations of the current DEPFET assessment methods. Thus, it suggests a new concise characterization procedure for DEPFET detectors as well as guidelines for expanded testing in order to increase the general knowledge of the DEPFET. With this study of four different DEPFET variants not only designs suitable for Athena mission have been found but also improvement impulses for the starting wafer-scale device production are provided.
| Universität: | Technische Universität Chemnitz | |
| Institut: | Professur Elektronische Bauelemente der Mikro- und Nanotechnik | |
| Fakultät: | Fakultät für Elektrotechnik und Informationstechnik | |
| Dokumentart: | Dissertation | |
| Betreuer: | Horstmann, John Thomas (Prof. Dr.-Ing. habil.) | |
| URL/URN: | http://nbn-resolving.de/urn:nbn:de:bsz:ch1-qucosa-193814 | |
| Quelle: | 2015. - 191 S. | |
| Freie Schlagwörter (Deutsch): | Röntgendetektor , Röntgenspektroskopie , Siliziumdetektor , Aktiver Pixelsensor , DEPFET , DEPFET Designstudie , MOSFET , Transistor , Athena | |
| Freie Schlagwörter (Englisch): | X-ray detectors , X-ray spectroscopy , Silicon-based detectors , Active pixel sensor , DEPFET , DEPFET design study , MOSFET , Transistor , Athena, Wide-Field Imager | |
| Tag der mündlichen Prüfung | 17.12.2015 |
