Eintrag in der Universitätsbibliographie der TU Chemnitz
Al Farisi, Muhammad Salmann* ; Hertel, Silvia ; Wiemer, Maik ; Otto, Thomas
Aluminum Patterned Electroplating from AlCl3–[EMIm]Cl Ionic Liquid towards Microsystems Application
Universität: | Technische Universität Chemnitz | |
Institut: | Professur Smart Systems Integration | |
Dokumentart: | Artikel in Fachzeitschrift, referiert | |
ISBN/ISSN: | 2072-666X | |
DOI: | doi:10.3390/mi9110589 | |
URL/URN: | https://www.mdpi.com/2072-666X/9/11/589/htm | |
Quelle: | In: Micromachines 2018. - MDPI AG. - 9(11), 589; https://doi.org/10.3390/mi9110589. 2018, 11, 589. - This paper is an extended version of our published paper “Investigation of aluminum patterned electrodeposition process from AlCl3–[EMIm]Cl ionic liquid for microsystems application”. In Proceedings of the 2018 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC), Mie, Japan, 17–21 April 2018 | |
Freie Schlagwörter (Englisch): | aluminum , electro-chemical deposition , ionic liquid , recurrent galvanic pulse , patterned deposition | |
OA-Lizenz | CC BY 4.0 |