Ergebnis der Datenbankabfrage
| Nr. | Titel | Autor | Jahr |
|---|---|---|---|
| 1 | A Multi-Model Dataset for BOSCH Plasma-Etching: Optical Emission Spectra, Process Parameters, and Wafer Measurements for Data-Driven Plasma Modeling | Sayyed, Mudassir Ali et al. | 2025 |
| 2 | Hybrid Spectral Data Compression for Efficient and Interpretable Bosch Process Monitoring | Sayyed, Mudassir Ali et al. | 2025 |
| 3 | Optical Emission Spectroscopy Analysis of the BOSCH Process Utilizing k-Means Clustering and Dynamic Mode Decomposition | Seifert, Tom* et al. | 2025 |
| 4 | Optomechanical Inertial Sensors Based on Ring Resonators: Design Approaches and Technology | Shaporin, Alexey et al. | 2025 |
| 5 | Transparent redirection of file-based data accesses for distributed scientific applications | Hofmann, Michael et al. | 2016 |
| Anzahl der Ergebnisseiten: | 1 |
| Anzahl der Dokumente: | 5 |
