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Nr. Titel Autor Jahr
1 A MEMS IR optical chopper based on subwavelength structures Kurth, Steffen et al. 2019
2 Mikro- und Nanotechnologien zur Herstellung steuerbarer optischer Filter Hiller, Karla et al. 2019
3 MEMS Tunable Fabry-Pérot Filters for Infrared Microspectrometer Applications Neumann, Norbert et al. 2016
4 Tunable Fabry-Pérot interferometer with subwavelength grating reflectors for MWIR microspectrometers Meinig, Marco et al. 2016
5 Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: a review Ebermann, Martin et al. 2016
6 VIS Fabry-Pérot-Interferometer with (HL)4 PE-Si3N4/PE-SiO2 reflectors on freestanding LP-Si3N4 membranes for surface enhanced Raman spectroscopy Helke, Christian et al. 2016
7 A fast MEMS infrared microspectrometer for the measurement of hydrocarbon gases Ebermann, Martin et al. 2015
8 Electrically tunable Fabry-Pérot interferometer with inherent compensation of the influence of gravitation and vibration Meinig, Marco et al. 2015
9 Subwavelength Grating Reflectors for Fabrication Cost Reduction of Fabry-Perot Infrared Filters Rupprecht, Julia* et al. 2015
10 Subwavelength grating reflectors in MEMS tunable Fabry-Perot infrared filters with large aperture Kurth, Steffen et al. 2014
11 Technology Approaches for Tuneable IR Fabry-Perot Filters applied in Gas Sensing Microspectrometers Hiller, Karla et al. 2014
12 Fabry-Perot tunable infrared filter based on structured reflectors Kurth, Steffen et al. 2012
13 Application of sub-wavelength structures in infrared optical filters Kurth, Steffen et al. 2011
14 Bestimmung des Nadelradius Jeß,Siegfried et al. 2010
15 Bestimmung des Nadelradius bei Tastschnittgeräten Frühauf, Joachim et al. 2010
16 Nanostrukturierte Breitbandreflektoren und deren Anwendung in abstimmbaren mikromechanischen Infrarot-Filtern Kurth, Steffen et al. 2010
17 Sub-wavelength structures for infrared filtering Kurth, Steffen et al. 2010
18 Application of Etched Silicon Springs as Guiding Mechanism for the Stylus in Tactile Surface Profilers Frühauf, Joachim et al. 2008
19 Assessment of Tactile Profilers by use of Regular Surface Artefacts with periodically Triangular Cross Section Seifert, Mario et al. 2008
20 Arrays of sensors with variable stiffness Shaporin, Alexey et al. 2007
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