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Nr.	Titel	Autor	Jahr
1	Characterization of negative tone photoresist mr-EBL 6000.5 for i-line stepper and electron beam lithography for the Intra-Level Mix & Match Approach	Schermer, Sebastian* et al.	2024
2	Intra-level mix and match lithography with electron beam lithography and i-line stepper combined with resolution enhancement for structures below the CD-limit	Helke, Christian* et al.	2023
3	Nanolithographic Fabrication Technologies for Network-Based Biocomputation Devices	Meinecke, Christoph R.* et al.	2023
4	Integration von thermosensitiven Polymeren in nanoskalige Kanäle zur Realisierung von mikrofluidischen Schaltungen	Bickmann, Ch. et al.	2022
5	Lithographic performance of resist ma-N 1402 in an e-beam/i-line stepper intra-level mix and match approach	Canpolat-Schmidt, Cansu Hanim et al.	2022
6	Solving Exact Cover Instances with Molecular-Motor-Powered Network-Based Biocomputation	Surendiran, Pradheebha et al.	2022
7	Gate Spacer Investigation zur Verbesserung der Geschwindigkeit von hochfrequenten Kohlenstoff-Nanoröhren-basierten Feldeffekttransistoren	Hartmann, Martin* et al.	2020
8	Integration of plasmonic nanostructures for micro-opto-electromechanical-systems	Heldt, Georg et al.	2019
9	Role of Contacts In Carbon Nanotube Giant Piezoresistive Sensors	Böttger, Simon* et al.	2019
10	Approach to combine electron-beam lithography and two-photon polymerization for enhanced nano-channels in network-based biocomputation devices	Heldt, Georg et al.	2018
11	Fabrication and Operation of Protein-Powered Biocomputation using Nanostructured Networks	Meinecke, Christoph Robert et al.	2018
12	Scalable Fabrication of Carbon Nanotube Field-Effect Transistors	Hermann, Sascha et al.	2017
13	Elektronenstrahl-lithographisch erzeugte Nanostrukturen für optische Mikrosysteme	Heldt, Georg et al.	2016

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Anzahl der Dokumente:	13