Eintrag in der Universitätsbibliographie der TU Chemnitz
Meinel, Katja ; Stoeckel, Chris ; Melzer, Marcel ; Zimmermann, Sven ; Forke, Roman ; Hiller, Karla ; Otto, Thomas
Piezoelectric Scanning Micromirror with Large Scan Angle Based on Thin Film Aluminum Nitride
| Universität: | Technische Universität Chemnitz | |
| Institut 1: | Zentrum für Mikrotechnologien (ZfM) | |
| Institut 2: | Professur Smart Systems Integration | |
| Dokumentart: | Konferenzbeitrag, referiert | |
| ISBN/ISSN: | 978-1-5386-8105-3 , 978-1-5386-8104-6 , 2167-0013 , 2167-0021 | |
| DOI: | doi:10.1109/TRANSDUCERS.2019.8808723 | |
| URL/URN: | https://ieeexplore.ieee.org/document/8808723 , https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8808723 | |
| Quelle: | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019 June 23-27, Berlin (Germany), Proceedings, pp 1518-1521. - IEEE, 2019 | |
| Freie Schlagwörter (Englisch): | Aluminum nitride , micromirror , microscanner , piezoelectric , aluminium compounds , finite element analysis , microactuators , micromirrors , piezoelectric thin films , silicon-on-insulator , springs (mechanical) , wide band gap semiconductors |
